Assembly and installation of an atomic layer deposition (ALD) system and deposition of Al2O3 and SiO2 films for different applications
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University of Minho - Dept. of Industrial Electronics - CMEMS
Campus de Azurém 4800-058 Guimarães Portugal | Tel: +351 253 510380 / Fax: +351 253 510189
CMEMS is supported by the Portuguese Foundation for Science and Technology (FCT) under the scope of the strategic funding UIDB/4436/2020, and UIDP/4436//2020.
Campus de Azurém 4800-058 Guimarães Portugal | Tel: +351 253 510380 / Fax: +351 253 510189
CMEMS is supported by the Portuguese Foundation for Science and Technology (FCT) under the scope of the strategic funding UIDB/4436/2020, and UIDP/4436//2020.
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