Facilities

CMEMS is a research center focused on the design, modeling, simulation, integration and fabrication of microsystems targeting preferentially biomedical devices. The organization of the center, supported by 5 laboratories, reflects the high level laboratory intensity of the center.

Research at CMEMS includes several activities, all with special requirements in terms of laboratory use.

CMEMS-UMinho has a new cleanroom laboratory. The Laboratory is a state-of-the-art facility with 130 m2 of cleanroom classified area (controlled temperature, pressure, humidity and a scrubber system) with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology.

A wide variety of metal and insulating thin films can be deposited by Atomic Layer Deposition – ALD with real-time ellipsometer included (for thermal and plasma processing), Sputtering (DC, RF), Evaporation and E-beam.

The Laboratory has a reactive ion etching plasma system – RIE (dry etching) and a bulk-micromachining system for wet chemical etching.

Thermal Processing is possible for Si wafers up to 150 mm in diameter, oxidation, drive-in, and annealing.

Lithography area is equipped with: an wet-bench (with spin-coating), Direct-Writing-Laser uMLA Heidelberg (600 nm resolution), Mask Aligner Karl Suss and vertical clean cabin class 100.

Characterization area is equipped with: a Nikon L200 Microscope with filtering, Ellipsometer, Profilometer, Eletrochemical-Gamry system and glove camera.

Now, particular focus is being laid on attaining high yield on structures smaller than 25 nm. With research and development in nanotechnology booming, this new process line positions CMEMS-UMinho to continue to be innovative for years to come. The Laboratory is also a member of Micro&Nanofabs@PT, the Portuguese Research Infrastructure for Micro and Nano Fabrication, www.micronanofabs.inl.int and of the European network EURONANOLAB.

 

The Computational Design, Modeling and Simulation Lab (CDMSLab) is dedicated to the computational design, modeling and simulation of biomechanical systems, medical devices and systems to assist in medical diagnostic, rehabilitation and health care. This lab addresses issues related to the prediction of medical devices interaction with human body.

CMEMS laboratories has also all available other microfabrication technologies such as laser micromachining, microcasting, microjoining, 3D printing or CNC micromachining and hybrid solutions. This has a highly intense laboratorial activity since the fabrication of devices requires the use of specialized existing equipment – Micro Fabrication and Systems Integration Lab. (MFSILab).

Similarly, surfaces functionalization research activities require various chemical, electrochemical, physical, mechanical, and laser-based techniques – Surfaces functionalization Lab (SFLab).

The fabricated microdevices need extensive characterization, both at device (performed at Materials/Components Characterization Lab. – MCCLab) and application level (using the Applied Devices and Instrumentation Lab. – ADILab).

Once again, characterization of microdevices is the type of activity that requires the use of lots of equipment and due to microsystems complexity, the characterization is also an intensive laboratory activity.

CMEMS